![]() Senturia Review: Microsystem Design is one of the first books to focus on design rather than manufacturing of MEMS. Recommended for new comers who want a gentle introduction and to (business) managers who need a crash course in MEMS jargon. However, this book is not in depth enough if you intend to design or fabricate microdevices. ![]() ![]() The level of treatment is almost non-technical: After reading this book, you will understand how MEMS devices work and how they are manufactured. Maluf Review: Maluf gives a good introduction to MEMS manufacturing and applications. Recommended MEMS books If you are serious about learning MEMS and microsystems, I recommend the following MEMS books: by N. Senturia, “Microsystem Design”,2001 Kluwer Academic Publishers. But it's hard to control lithography by manual control equipment for thick PR. One of the solutions to the problem above is to have the dimple structures to control. ![]() However, according to their device design, one design (mechanical. It is appropriate for textbook use by senior/graduate courses in MEMS, and will be a useful reference for the active MEMS professional. This book is used for a graduate course in 'Design and Fabrication of Microelectromechanical Devices (MEMS)' at the Massachusetts Institute of Technology.
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